US Patent Issued to ASML Netherlands on Feb. 17 for "Systems and methods for signal electron detection" (California Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,555,738, issued on Feb. 17, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Systems and methods for signal electron detection" was invented by Weiming Ren (San Jose, Calif.) and Yongxin Wang (San Ramon, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods of observing a sample using an electron beam apparatus are disclosed. The electron beam apparatus comprises an electron source configured to generate a primary electron beam along a primary optical axis, and a first electron detector having a first detection layer substantially parallel to the primary optical axis and configured to detect a first portion of a plura...