US Patent Issued to ASML Netherlands on Aug. 18 for "Methods of mitigating crosstalk in metrology images" (Dutch Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,710,699, issued on Aug. 18, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Methods of mitigating crosstalk in metrology images" was invented by Robin Daniel Buijs (Eindhoven, Netherlands) and Willem Marie Julia Marcel Coene (Mierlo, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a method of determining an orthonormalized structure of interest reference image, the orthonormalized structure of interest reference image for applying to a measured image of the structure of interest to correct for the effect of crosstalk from at least one nuisance structure. The method comprises determining a structure of interest re...