ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,147, issued on Aug. 18, was assigned to ASML NETHERLANDS N.V. (Veldhoven, Netherlands).
"Charged-particle optical device" was invented by Marco Jan-Jaco Wieland (Delft, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "Charged-particle optical devices are disclosed. In one arrangement, a device includes a charged particle column and a light sensor. An objective lens array projects a plurality of beams towards a sample and has a plurality of electrodes arranged along a path of the plurality of beams. A plurality of scintillators receives signal particles emitted from the sample. Light is generated in response to the received signal particles...