US Patent Issued to ASML NETHERLANDS on April 21 for "Base plate and substrate assembly" (Dutch Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,610,781, issued on April 21, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Base plate and substrate assembly" was invented by Gosse Charles De Vries (Veldhoven, Netherlands) and Dennis Dominic Van Der Voort (Best, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A base plate configured to be attached to a semiconductor substrate, wherein the base plate is configured to remain attached to the semiconductor substrate during a sequence of processing steps performed on the semiconductor substrate, and the base plate is made from a material having a Young's modulus larger than 300 GPa."

The patent was filed on Aug. 10, 2021, un...