ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,265, issued on April 21, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Actuator arrangement and electron-optical column" was invented by Derk Ferdinand Walvoort (Pijnacker, Netherlands), Marc Smits (Pijnacker, Netherlands) and Teunis Van De Peut (Leusden, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is an actuator arrangement comprising: a wall defining a cavity; a casing protruding from the wall and defining an interior in fluid communication with the cavity; an actuator comprising: a force imparter configured to impart force on a component in the cavity; and an actuation mechanism configured to dr...