US Patent Issued to ASML HOLDING on Nov. 18 for "Pod handling systems and methods for a lithographic device" (Connecticut Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,474,633, issued on Nov. 18, was assigned to ASML HOLDING N.V. (Veldhoven, Netherlands).

"Pod handling systems and methods for a lithographic device" was invented by Boris Kogan (Norwalk, Conn.), Robert Jeffrey Wade (Stamford, Conn.), George Hilary Harrold (Redding, Conn.) and Matthew Boudreau (Norwalk, Conn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems, apparatuses, and methods are provided for transporting a reticle chamber (pod) for processing. In one example, a system for transporting the pod is disclosed. The system may include a moving apparatus, abase coupled to the moving apparatus, and a gripping ring extending from the base. In some a...