ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,729,435, issued on Sept. 8, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Methods for depositing gap-filling fluids and related systems and devices" was invented by Rene Henricus Jozef Vervuurt (Leuven, Belgium), Timothee Blanquart (Oud-Heverlee, Belgium) and Viljami Pore (Helsinki).
According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for filling a gap comprised in the substrate with a gap filling fluid. The gap filling fluid is formed in a plasma with a first precursor and a second precursor."
The patent was filed on Dec. 30, 2022, under Application No. 18/148,568.
*For further information, including images, charts and tabl...