ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,747,500, issued on Sept. 29, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Liquid vaporizer" was invented by Jereld Lee Winkler (Gilbert, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor processing device is disclosed. The semiconductor device includes a reactor and a vaporizer configured to provide a reactant vapor to the reactor. The device can include a process control chamber between the vaporizer and the reactor. The device can include a control system configured to modulate a pressure in the process control chamber based at least in part on feedback of measured pressure in the process control chamber."
The paten...