ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,742,242, issued on Sept. 22, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Methods of forming structures, semiconductor processing systems, and semiconductor device structures" was invented by Amir Kajbafvala (Chandler, Ariz.), Yanfu Lu (Phoenix), Robinson James (Phoenix) and Caleb Miskin (Mesa, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of forming structure includes providing a substrate in a reaction chamber, forming a first layer overlaying the substrate, and forming a second layer onto the first layer. Temperature of the first layer is controlled during the forming of the first layer using infrared electromagnetic r...