US Patent Issued to ASM IP Holding on Sept. 15 for "Processing chamber, assembly and a method" (Finnish Inventor)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,738,458, issued on Sept. 15, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Processing chamber, assembly and a method" was invented by Antti Niskanen (Helsinki).

According to the abstract* released by the U.S. Patent & Trademark Office: "The current disclosure relates to a semiconductor processing chamber comprising a showerhead, the showerhead comprising a showerplate for providing a reactant into the processing chamber. The processing chamber further comprises a moveable susceptor for holding a substrate; wherein the processing chamber has a showerplate axis extending vertically through the showerplate; a substrate axis extending vertically at a position at which the ...