US Patent Issued to ASM IP Holding on Nov. 3 for "Thermal monitor for high pressure processing" (Arizona Inventors)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,781,388, issued on Nov. 3, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Thermal monitor for high pressure processing" was invented by Sandeep Ghosh (Chandler, Ariz.), Robinson James (Phoenix), Caleb Miskin (Mesa, Ariz.), Amir Kajbafvala (Chandler, Ariz.), Arun Murali (Tempe, Ariz.), Frederick Aryeetey (Phoenix) and Alexandros Demos (Scottsdale, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor processing system includes a precursor delivery arrangement, a chamber arrangement, and a controller. The chamber arrangement is connected to the precursor delivery arrangement. The controller is operatively connected to the precur...