US Patent Issued to ASM IP Holding on May 19 for "Interface module having fan filter unit" (Japanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,631,358, issued on May 19, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Interface module having fan filter unit" was invented by Masashi Nakano (Tama, Japan) and Masaei Suwada (Nagaoka, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Examples of an interface module include a fan filter unit including a fan and a filter, a housing surrounding a space adjacent to the filter, a discharge system attached to the housing, a substrate support instrument provided in the housing, an upper housing surrounding a space adjacent to the fan, a gas supply system attached to the upper housing, a circulation duct connected to the housing and the upper...