US Patent Issued to ASM IP Holding on June 16 for "Capacitive sensor system for precursor level measurement and method therefor" (Belgian Inventor)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,656,165, issued on June 16, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Capacitive sensor system for precursor level measurement and method therefor" was invented by Vincent Vandalon (Heverlee, Belgium).

According to the abstract* released by the U.S. Patent & Trademark Office: "In the present description, a capacitive sensor system is described by means of which the amount of solid precursor in a precursor vessel for a semiconductor manufacturing process can be determined and to a method for using the same. The system comprises at least two electrodes that are arranged in a substantially parallel manner within the precursor vessel."

The patent was filed on July 26, ...