US Patent Issued to ASM IP Holding on July 7 for "Vapor deposition processes, reactants and deposition assemblies" (Canadian, Belgian, Finnish Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,677,607, issued on July 7, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Vapor deposition processes, reactants and deposition assemblies" was invented by Sean T. Barry (Ottawa), Goran Bacic (Ottawa), Charles Dezelah (Helsinki), Timothee Blanquart (Oud-Heverlee, Belgium), Rene Henricus Jozef Vervuurt (Leuven, Belgium) and Peter Gordon (Ottawa).

According to the abstract* released by the U.S. Patent & Trademark Office: "Vapor phase methods of depositing a metal or a semimetal-comprising materials on a substrate are provided. In the methods, various metal or semimetal precursors may be used together with reactants that may generate hydrogen radical or amino radical to react...