US Patent Issued to ASM IP Holding on Jan. 13 for "Electrostatic chuck pedestal heater for high bow wafers" (Arizona Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,525,480, issued on Jan. 13, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Electrostatic chuck pedestal heater for high bow wafers" was invented by Shubham Garg (Tempe, Ariz.), Jaeyong Cho (Mesa, Ariz.), Amit Mishra (Tempe, Ariz.) and Akshay Phadnis (Phoenix).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck (ESC) pedestal heater that includes a pedestal body and a surface on the pedestal body for receiving a substrate such as a high bow wafer. An electrode is embedded in the pedestal body to selectively generate an electrostatic force. The ESC pedestal heater includes a substrate contact surface that is raised to a heigh...