US Patent Issued to ASM IP Holding on Feb. 24 for "Apparatus and methods for cooling reaction chambers in semiconductor processing systems" (Arizona Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,563,998, issued on Feb. 24, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Apparatus and methods for cooling reaction chambers in semiconductor processing systems" was invented by Junwei Su (Tempe, Ariz.), Rutvij Naik (Tempe, Ariz.), Xing Lin (Chandler, Ariz.), Alexandros Demos (Scottsdale, Ariz.) and Hamed Esmaeilzadehkhosravieh (Phoenix).

According to the abstract* released by the U.S. Patent & Trademark Office: "A reflector includes a reflector body arranged to overlap a reaction chamber of a semiconductor processing system. The reflector body has a grooved surface and a reflective surface extending between a first longitudinal edge of the reflector body and a second ...