ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,544,727, issued on Feb. 10, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Process chamber with side support" was invented by Youness Alvandi-Tabrizi (Tempe, Ariz.), John DiSanto (Scottsdale, Ariz.) and Shiva K.T. Rajavelu Muralidhar (Tempe, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A process chamber can include a curved upper wall extending longitudinally from a first end portion of the reaction chamber to a second end portion of the reaction chamber. The process chamber can include a curved lower wall cooperating with the curved upper wall to at least partially define an internal cavity, the curved lower wall connected to the c...