ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,350, issued on Dec. 30, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Apparatus and method to process wafers" was invented by Theodorus G.M. Oosterlaken (Oudewater, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosure relates to an apparatus for processing wafers with a process chamber to process wafers held in a wafer boat; a cassette handler chamber to handle wafer cassettes; and, a wafer handler chamber provided with a wafer handler to transfer wafers from wafer cassettes to the wafer boat. The wafer handler is constructed and arranged to transfer wafers between a wafer storage, the wafer boat and wafer cassette...