US Patent Issued to ASM IP Holding on Aug. 18 for "Methods and apparatus for solid source refill" (Arizona Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,709,800, issued on Aug. 18, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Methods and apparatus for solid source refill" was invented by Jereld Lee Winkler (Gilbert, Ariz.), Jacqueline Wrench (Mesa, Ariz.), Paul Ma (Scottsdale, Ariz.), Todd Robert Dunn (Cave Creek, Ariz.), Jonathan Bakke (Phoenix), Eric James Shero (Phoenix), Shuaidi Zhang (Chandler, Ariz.), Shubham Garg (Tempe, Ariz.) and YoungChol Byun (Tempe, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Various embodiments of the present technology may provide a first vessel to contain a slurry of a solid precursor powder and an inert liquid, a second vessel to receive the slurr...