ALEXANDRIA, Va., April 7 -- United States Patent no. 12,598,943, issued on April 7, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Wafer boat system, holder ring and use thereof" was invented by Theodorus G.M. Oosterlaken (Oudewater, Netherlands), Anne Geertruid Maria Spruit (Utrecht, Netherlands), Marina de Jager (Dronten, Netherlands), Bram van den Brink (Bussum, Netherlands) and Angelos Karagiannis (Leuven, Belgium).
According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer boat system comprises a carrier and a plurality of holder rings configured to support a wafer in the carrier. Each of the holder rings has an annular body and ring projections projecting from said annular body for contact with ...