US Patent Issued to ASM IP Holding on April 7 for "Fixtures and methods for positioning process kit components within reaction chambers" (Arizona Inventor)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,598,946, issued on April 7, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Fixtures and methods for positioning process kit components within reaction chambers" was invented by KiHyun Kim (Chandler, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A fixture, for example, comprised in a semiconductor processing system, includes a standoff arranged for fixation relative to a reaction chamber of a semiconductor processing system. A slide member is slidably supported by the standoff and is translatable along a carrying axis extending into the reaction chamber. A male threaded member depends from the slide member and is rotatable about a sea...