US Patent Issued to APPLIED MATERIALS on Sept. 9 for "Tab arrangement for retaining support elements of substrate support" (Indian, American Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,412,774, issued on Sept. 9, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Tab arrangement for retaining support elements of substrate support" was invented by Fred Eric Ruhland (Pleasanton, Calif.), Pavankumar Ramanand Harapanhalli (Bangalore, India), Gaurav Shrivastava (Bengaluru, India) and Yao-Hung Yang (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of substrate supports are provided herein. In some embodiments, a substrate support includes: a first plate having a plurality of openings extending into the first plate from an upper surface of the first plate to a bottom surface of each respective openi...