ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,411,504, issued on Sept. 9, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Piezo position control flow ratio control" was invented by Ashley Okada (San Jose, Calif.) and Ming Xu (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A flow ratio controller (FRC) valve includes a displacement device configured to control fluid flow through the FRC valve, a displacement sensor coupled to the displacement device, and a processing device. The processing device is to: identify an input signal indicative of a first setpoint to preposition the displacement device for a process of a recipe; commence, based on the input signal, adjustm...