US Patent Issued to Applied Materials on Sept. 8 for "Susceptor assembly thermal break and methods for cooling a susceptor assembly" (Indian, American Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,453, issued on Sept. 8, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Susceptor assembly thermal break and methods for cooling a susceptor assembly" was invented by Vijayabhaskara Venkatagiriyappa (Bangalore, India), Laxman Vitthalrao Deshmukh (Bangalore, India) and Chau T. Nguyen (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatus and methods for cooling down a susceptor assembly are described. A heat exchange passage in a susceptor assembly thermal break transfers heat from processing gases that flow through the susceptor assembly to a cooling jacket and cools down the susceptor assembly and associated hardw...