US Patent Issued to Applied Materials on Sept. 8 for "Substrate handling device with vertical and horizontal rails for cleaning modules" (American, Indian Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,728,540, issued on Sept. 8, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Substrate handling device with vertical and horizontal rails for cleaning modules" was invented by Jagan Rangarajan (San Jose, Calif.), Edward Golubovsky (San Jose, Calif.), Edwin Velazquez (Union City, Calif.), Adrian S. Blank (Gilroy, Calif.), Steven M. Zuniga (Soquel, Calif.) and Balasubramaniam C. Jagannathan (Bangalore, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "A cleaning system includes a blade handling assembly configured to transport and clean a substrate. The blade handling assembly for handling a substrate in the cleaning system includes a gri...