US Patent Issued to Applied Materials on Sept. 8 for "Integrated PVD tungsten liner and seamless CVD tungsten fill" (California Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,466, issued on Sept. 8, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Integrated PVD tungsten liner and seamless CVD tungsten fill" was invented by Yi Xu (San Jose, Calif.), Xianyuan Zhao (Santa Clara, Calif.), Zhimin Qi (Santa Clara, Calif.), Aixi Zhang (Santa Clara, Calif.), Geraldine Vasquez (Santa Clara, Calif.), Dien-Yeh Wu (Santa Clara, Calif.), Wei Lei (Santa Clara, Calif.), Xingyao Gao (San Jose, Calif.), Shirish Pethe (Cupertino, Calif.), Wenting Hou (Sunnyvale, Calif.), Chao Du (Santa Clara, Calif.), Tsung-Han Yang (San Jose, Calif.), Kyoung-Ho Bu (Pleasanton, Calif.), Chen-Han Lin (Sunnyvale, Calif.), Jallepally Ravi (San Ramon, Calif.), Yu Lei (Belmont...