ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,443, issued on Sept. 8, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Electrostatic clamp having charge control assembly" was invented by Vijay D. Parkhe (San Jose, Calif.) and Kevin Richard Verrier (Hampton, N.H.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic clamp system may include a conductive base; a ceramic body, having an inner side that is attached to the conductive base, and an outer side to face a substrate, the ceramic body including an electrode assembly; and a charge control assembly, the charge control assembly defining an electrically conductive structure that is isolated from the electrode assembly a...