ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,751,236, issued on Sept. 29, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Temperature control system with flammable heat transfer fluid" was invented by Rony David Mathew (Bengaluru, India) and Varun Kumar Chenna (Bangalore, India).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system includes a closed loop configured to flow a heat transfer fluid to regulate temperature of a process tool. The heat transfer fluid includes a flammable or combustible fluid. The system further includes a temperature control unit configured to receive the heat transfer fluid and regulate temperature of the heat transfer fluid. The system further includes...