US Patent Issued to Applied Materials on Sept. 29 for "Part, sensor, and metrology data integration" (California Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,748,407, issued on Sept. 29, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Part, sensor, and metrology data integration" was invented by Garrett Ho-Yee Sin (Sunnyvale, Calif.), Sidharth Bhatia (Santa Cruz, Calif.), Katty Marie Lydia Gamon Guyomard (Los Altos, Calif.), Shawyon Jafari (Sunnyvale, Calif.), Heng-Cheng Pai (Cupertino, Calif.), Pramod Nambiar (Sunnyvale, Calif.), Paul Lukas Brillhart (Pleasanton, Calif.) and Ilker Durukan (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes identifying sets of part data associated with substrate processing equipment. Each of the sets of part data includes corres...