US Patent Issued to Applied Materials on Sept. 22 for "In situ film growth sensor assembly, apparatus, and methods" (California, Arizona Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,745,604, issued on Sept. 22, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"In situ film growth sensor assembly, apparatus, and methods" was invented by Zhepeng Cong (San Jose, Calif.), Tao Sheng (Santa Clara, Calif.), Xinning Luan (Tempe, Ariz.), Enle Choo (Saratoga, Calif.) and Ala Moradian (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein generally relate to in situ monitoring of film growth in processing chambers. In some examples, a sensor assembly for a processing chamber includes a sensor tube including silicon carbide and having an optical path therein and a sensor window including cr...