US Patent Issued to Applied Materials on Sept. 22 for "Cooling frame for diffuser" (South Korean, American Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,742,239, issued on Sept. 22, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Cooling frame for diffuser" was invented by Jong Yun Kim (Gyeonggi-do, South Korea), William Nehrer (Soquel, Calif.), Sang Jeong Oh (Santa Clara, Calif.) and Han Byoul Kim (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary substrate processing chambers may include a chamber body defining a processing region. The chambers may include a backing plate disposed atop the chamber body, a diffuser above the processing region and supported by the backing plate, and a cooling frame disposed between the backing plate and the diffuser. The c...