US Patent Issued to Applied Materials on Sept. 2 for "Substrate carrier with array of independently controllable heater elements" (California Inventors)

ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,406,865, issued on Sept. 2, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Substrate carrier with array of independently controllable heater elements" was invented by Steven E. Babayan (Los Altos, Calif.), Phillip Criminale (Livermore, Calif.) and Zhiqiang Guo (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate carrier is described with an array of independently controllable heater elements. In one example an apparatus includes a substrate carrier to carry a substrate for processing, a plurality of resistive heating elements in the carrier to heat the substrate by heating the carrier, a power supply to supply po...