US Patent Issued to Applied Materials on Sept. 15 for "Remote plasma apparatus for generating high-power density microwave plasma" (California Inventor)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,738,457, issued on Sept. 15, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Remote plasma apparatus for generating high-power density microwave plasma" was invented by Mehran Moalem (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include a plasma source. In an embodiment, a plasma source comprises a dielectric body with a top surface, a bottom surface, and sidewall surfaces. In an embodiment, a plurality of holes pass through the dielectric body, where a first set of holes pass from the top surface to the bottom surface, and a second set of holes pass between opposite sidewall surfaces. In an...