US Patent Issued to Applied Materials on Sept. 15 for "Real-time detection of particulate matter during deposition chamber manufacturing" (California Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,738,467, issued on Sept. 15, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Real-time detection of particulate matter during deposition chamber manufacturing" was invented by Mehdi Vaez-Iravani (Los Gatos, Calif.), Todd J. Egan (Fremont, Calif.) and Kyle Ross Tantiwong (Livermore, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Implementations disclosed describe a system that includes a deposition chamber, a light source to produce an incident beam of light, wherein the incident beam of light is to illuminate a region of the deposition chamber, and a camera to collect a scattered light originating from the illuminated region of th...