US Patent Issued to Applied Materials on Sept. 1 for "Substrate support device with diagnostic capabilities" (Indian, American Inventors)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,727,427, issued on Sept. 1, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Substrate support device with diagnostic capabilities" was invented by Deepak Patel (Karnataka, India), Pandu Maddherla (Karnataka, India), Sushant S. Koshti (Sunnyvale, Calif.) and Jeffrey C. Hudgens (San Francisco).

According to the abstract* released by the U.S. Patent & Trademark Office: "A load lock including a substrate support device for supporting a substrate, and an indexer coupled to the substrate support device. The substrate support device may take measurements and acquire data to verify features of the supported substrate and an associated manufacturing system. Substrate features t...