US Patent Issued to Applied Materials on Sept. 1 for "Remote plasma source" (California Inventors)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,725,761, issued on Sept. 1, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Remote plasma source" was invented by Kartik Ramaswamy (San Jose, Calif.), Mehran Moalem (Fremont, Calif.), Farhad Moghadam (Saratoga, Calif.) and Eller Y. Juco (San Leandro, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Some embodiments are directed to a remote plasma system. The remote plasma system may include: a first tube; a second tube; a first isolation component coupled between a first end of the first tube and a first end of the second tube; a second isolation component coupled between a second end of the first tube and a second end of the second ...