US Patent Issued to Applied Materials on Sept. 1 for "Modeling substrate temperatures" (California Inventors)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,727,433, issued on Sept. 1, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Modeling substrate temperatures" was invented by Alvaro Garcia (Mountain View, Calif.), Tony Jefferson Gnanaprakasa (Mountain View, Calif.) and Sankaranarayanan Ravi (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method and controller for processing substrates are described herein. In one example, a method of processing a substrate on a substrate support disposed on a cooling base comprises obtaining a temperature value at a bottom of the substrate support, obtaining a temperature value associated with the cooling base, determining a substra...