US Patent Issued to Applied Materials on Oct. 6 for "Process chamber with reflector" (California Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,754,392, issued on Oct. 6, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Process chamber with reflector" was invented by Ala Moradian (Sunnyvale, Calif.), Amir H. Tavakoli (San Jose, Calif.), Peter Reimer (Santa Clara, Calif.) and Shu-Kwan Lau (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A reflector and processing chamber having the same are described herein. In one example, a reflector is provided that includes cylindrical body, a cooling channel, and a reflective coating. The cylindrical body has an upper surface and a lower surface. The lower surface has a plurality of concave reflector structures disposed around ...