US Patent Issued to Applied Materials on Oct. 27 for "Susceptor height adjustment" (California Inventor)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,889, issued on Oct. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Susceptor height adjustment" was invented by Vijay D. Parkhe (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A susceptor includes a plurality of substrate support subsections. The susceptor further includes a vertical-movement component associated with a first substrate support subsection of the plurality of substrate support subsections. The vertical-movement component is configured to vertically move at least a portion of the first substrate support subsection."

The patent was filed on Aug. 21, 2023, under Application No. 18/236,115.

*For furt...