ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,442,074, issued on Oct. 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"System and method for controlling foreline pressure" was invented by Ryan T. Downey (San Jose, Calif.), James L'Heureux (Santa Clara, Calif.) and Rony David Mathew (Bengaluru, India).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system and method for controlling pressure in a foreline of a processing system are disclosed herein that reduce variation in foreline pressure. In one example, a processing system is provided that includes a first process chamber, a first pump, a foreline, and a first foreline pressure control system. The first pump has an inlet and an ...