US Patent Issued to Applied Materials on Oct. 14 for "Plasma source with a coolant leakage detection system" (California Inventor)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,444,571, issued on Oct. 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Plasma source with a coolant leakage detection system" was invented by Ryan T. Downey (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein are a plasma source, an abatement unit, and a method for detecting a coolant leak. The plasma source includes an RF generation system coupled with a cooling system. The RF generation system includes one or more electrical components comprising a hollow RF antenna for generating a plasma. The cooling system includes a coolant channel extending through the plasma source, including the electrical compo...