ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,459,071, issued on Nov. 4, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Cooling base for a substrate support" was invented by Yogananda Sarode Vishwanath (Bangalore, India) and Anand Kumar (Bangalore, India).
According to the abstract* released by the U.S. Patent & Trademark Office: "In one example, a substrate support assembly having a cooling base that promotes temperature uniformity. In one embodiment, the cooling base has a top plate. The top plate has cooling channels formed therein. The cooling base has a middle plate. The middle plate has a cooling return plenum disposed on a middle layer. A plurality of islands are disposed in the cooling return plenum. The m...