US Patent Issued to Applied Materials on Nov. 3 for "Substrate carrier to control temperature of substrate" (California Inventors)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,781,336, issued on Nov. 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Substrate carrier to control temperature of substrate" was invented by Takashi Kuratomi (San Jose, Calif.) and Ki-Pyo Hong (East Palo Alto, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for processing a semiconductor substrate, such as an optical device, is described herein. The apparatus includes a substrate carrier which is configured to enable a processing chamber configured to process larger substrates to process a smaller substrate without retrofitting the processing chamber. The substrate carrier includes a carrier base and a clamp ring. T...