US Patent Issued to Applied Materials on Nov. 3 for "Method to determine line angle and rotation of multiple patterning" (California Inventors)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,782,234, issued on Nov. 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Method to determine line angle and rotation of multiple patterning" was invented by Yongan Xu (Santa Clara, Calif.), Chan Juan Xing (San Jose, Calif.), Jinxin Fu (Fremont, Calif.) and Ludovic Godet (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method and apparatus for determining a line angle and a line angle rotation of a grating or line feature is disclosed. An aspect of the present disclosure involves, measuring coordinate points of a first line feature using a measurement tool, determining a first slope of the first line feature from the co...