ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,782,930, issued on Nov. 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Integrated hybrid predictive monitoring of manufacturing systems" was invented by Jimmy Iskandar (Fremont, Calif.), Fei Li (Houston), Arvind Shankar Raman (Austin, Texas), James Robert Moyne (Canton, Mich.), Eda Tuncel (Menlo Park, Calif.) and Michael Armacost (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Implementations relate to techniques of monitoring conditions of tools used in device manufacturing systems. The techniques include storing a failure index (FI) model generated using run-time sensor data that was collected during operations of a ...