US Patent Issued to Applied Materials on Nov. 3 for "Control and prediction of multiple plasma coupling surfaces and corresponding power transfer" (New York, California Inventors)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,785,041, issued on Nov. 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Control and prediction of multiple plasma coupling surfaces and corresponding power transfer" was invented by David Coumou (Webster, N.Y.), Zhi Wang (Sunnyvale, Calif.), Tao Zhang (San Ramon, Calif.) and David Peterson (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include a process power controller for a plasma processing tool. In an embodiment, the process power controller includes a process power source optimizer, a source predictor, and a process uniformity controller. In an embodiment, the source predictor is commu...