US Patent Issued to APPLIED MATERIALS on May 5 for "Creating ion energy distribution functions (IEDF)" (American, French Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,546, issued on May 5, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Creating ion energy distribution functions (IEDF)" was invented by Leonid Dorf (San Jose, Calif.), Travis Koh (Santa Clara, Calif.), Olivier Luere (San Jose, Calif.), Olivier Joubert (Meylan, France), Philip A. Kraus (San Jose, Calif.), Rajinder Dhindsa (Pleasanton, Calif.) and James Rogers (Los Gatos, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for creating arbitrarily-shaped ion energy distribution functions using shaped-pulse-bias. In an embodiment, a method includes applying a negative jump voltage to an electrode of a process chamber...