ALEXANDRIA, Va., June 12 -- United States Patent no. 12,301,199, issued on May 13, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Impedance tuning utility of vector space defined by transmission line quantities" was invented by David Coumou (Webster, N.Y.) and David Peterson (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include a method of impedance tuning in a semiconductor processing tool. In an embodiment, the method comprises measuring a voltage and a current of a transmission line, converting an analog voltage signal and an analog current signal into a digital voltage signal and a digital current signal, calculating a u-vector from the digi...