US Patent Issued to Applied Materials on May 12 for "Pumping liners with self-adjusting pumping conductance" (California Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,624,446, issued on May 12, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Pumping liners with self-adjusting pumping conductance" was invented by Muhannad Mustafa (Milpitas, Calif.) and Muhammad M. Rasheed (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Pump liners and process chambers with the pump liners are described. The pump liner has a ring-shaped body with an annular wall enclosing a process region. A plurality of circumferentially spaced openings provide fluid communication through the annular wall between the process region and a region outside of the ring-shaped body. Each of the plurality of circumferentially s...