US Patent Issued to Applied Materials on May 12 for "Magnetic sensor assembly for a substrate process station" (German Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,628,612, issued on May 12, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Magnetic sensor assembly for a substrate process station" was invented by Erich Neumann (Dresden, Germany) and Konstantin Konle (Dresden, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A process station includes: a housing; a membrane disposed in the housing, the membrane isolating a first region within the housing from a second region within the housing; a first magnetic levitation actuator assembly disposed in the first region, the first magnetic levitation assembly including: a plurality of stators configured to levitate and drive a carrier within the sec...